Measurements from a novel interferometer for EUVL mirror substrates

A previously reported interferometer without intermediate optics is used to perform measurements on an aspherical extreme ultraviolet lithography mirror substrate. Acousto-optic modulation based phase shifting is used together with a novel phase retrieval algorithm to retrieve the phase distribution from our interferograms. The phase...

Michelson wide-field stellar interferometry: Principles and experimental verification

A new interferometric technique for Michelson wide-field interferometry is presented that consists of a Michelson pupil-plane combination scheme in which a wide field of view can be achieved in one shot. This technique uses a stair-shaped mirror in the intermediate image plane of each telescope in the array, allowing for simultaneous correction...