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Serebriakov, A. (author), Bociort, F. (author), Braat, J. (author)
In the year 2001 it was reported that the birefringence induced by spatial dispersion (BISD), sometimes also called intrinsic birefringence, had been measured and calculated for fluorides CaF2 and BaF2 in the deep UV range. It was also shown that the magnitude of the BISD in these cubic crystals is sufficiently large to cause serious problems...
conference paper 2005
document
Marinescu, O.E. (author), Bociort, F. (author), Braat, J.J.M. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO
journal article 2005
document
Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO
journal article 2005
document
Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)
When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...
conference paper 2004
document
Serebriakov, A. (author), Maksimov, E. (author), Bociort, F. (author), Braat, J. (author)
The subject of birefringence induced by spatial dispersion (BISD), also called intrinsic birefringence, recently became an important issue for 157-nm lithography. For the deep UV range, because of intrinsic absorption, only crystalline materials can be used as optical materials for lens manufacturing. The physical properties of crystals are...
conference paper 2004
document
Braat, J.J.M. (author), Bociort, F. (author), Marinescu, O.E. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
document
Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
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