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Braat, J.J.M. (author)
Document(en) uit de collectie Chemische Procestechnologie
report 1961
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Braat, J. (author)
report 1971
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Braat, J. (author)
report 1973
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Braat, J. (author)
report 1973
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Braat, F.W. (author), Van Holk, L.C.A. (author)
Document(en) uit de collectie Chemische Procestechnologie.
report 1976
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Braat, R.G. (author)
Document uit de collectie Chemische Procestechnologie
report 1980
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Braat, R.G. (author), Kingma, E. (author), Punt, A.R. (author)
report 1980
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Braat, A. (author), Markx, G.H. (author)
Document(en) uit de collectie Chemische Procestechnologie.
report 1986
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Braat, J.J.M. (author)
public lecture 1989
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Braat, G.F.M. (author)
doctoral thesis 1993
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Wang, H. (author), Groen, F.H. (author), Pereira, S.F. (author), Braat, J.J.M. (author)
In photonics, light usually diffracts in all directions when it emerges from a planar optical waveguide. Besides this fact, in this letter we show that a waveguide with a rectangular cross section can be turned to a focusing system by using three-dimensional self-imaging technique. We obtained a configuration where the focus of the field lies...
journal article 2003
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Meeder, M. (author), Mauret, T. (author), Booij, S. (author), Braat, J. (author), Faehnle, O. (author)
The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimising finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that...
conference paper 2003
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Booij, S.M. (author), Fähnle, O.W. (author), Meeder, M. (author), Wons, T. (author), Braat, J.J.M. (author)
A variation on the fluid jet polishing (FJP) technique, arbitrarily named Jules Verne (JV), will be described in this article. Jules Verne is a glass processing technique that removes material due to the fact that the tool and the surface are in close contact, and a slurry moves in between the tool and the surface. This approach has both...
conference paper 2003
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Braat, J.J.M. (author), Bociort, F. (author), Marinescu, O.E. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
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Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
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Serebriakov, A. (author), Maksimov, E. (author), Bociort, F. (author), Braat, J. (author)
The subject of birefringence induced by spatial dispersion (BISD), also called intrinsic birefringence, recently became an important issue for 157-nm lithography. For the deep UV range, because of intrinsic absorption, only crystalline materials can be used as optical materials for lens manufacturing. The physical properties of crystals are...
conference paper 2004
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Dirksen, P. (author), Braat, J. (author), Janssen, A.J.E.M. (author), Leeuwestein, A. (author), Kwinten, H. (author), Van Steenwinckel, D. (author)
This study presents an experimental method to determine the resist parameters that are at the origin of a general blurring of the projected aerial image. The resist model includes the effects of diffusion in the horizontal plane and a second cause for image blur that originates from a stochastic variation of the focus parameter. The used...
conference paper 2004
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Krieg, M.L. (author), Braat, J.J.M. (author)
This paper will illustrate several approaches to retrieving the shape of aspherical reflective surfaces as used in EUV Lithography, from measurements from a previously reported angstrom-accuracy interferometer. First, the working principles of the interferometer will be reviewed, and typical measurement data expected from the instrument will be...
conference paper 2004
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Wang, H. (author), Groen, F.H. (author), Pereira, S.F. (author), Braat, J.J.M. (author)
We present an analysis of the reading capability of a novel optical pickup consisting of a single-mode and a multi-mode rectangular waveguide. According to the simulations, if one has prior information about the structure of the disk, superresolution readout could be achieved. The proposed system has the advantage to be compact and should be...
conference paper 2004
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Musa, S. (author), Pereira, S.F. (author), Braat, J.J.M. (author), Fransoo, F. (author), Van Thourhout, D. (author), Baets, R. (author)
We present a study on the use of optical waveguides in readout units for optical recording. Optical waveguides can be used to increase the storage capacity of optical recording, which is limited by diffraction. Optical waveguides are attractive for application in readout units of optical recording systems because it is possible to make compact...
conference paper 2004
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