Searched for:
(1 - 1 of 1)
document
Van Haver, S. (author), Janssen, O.T.A. (author), Braat, J.J.M. (author), Janssen, A.J.E.M. (author), Urbach, H.P. (author), Pereira, S.F. (author)
In this paper we introduce a new mask imaging algorithm that is based on the source point integration method (or Abbe method). The method presented here distinguishes itself from existing methods by exploiting the through-focus imaging feature of the Extended Nijboer-Zernike (ENZ) theory of diffraction. An introduction to ENZ-theory and its...
conference paper 2008