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The chemical-mechanical relationship of the SiOC(H) dielectric film

Yuan, C. (author), Van Der Sluis, O. (author), Zhang, G.Q. (author), Ernst, L.J. (author), Van Driel, W.D. (author), Van Silfhout, R.B.R. (author), Thijsse, B.J. (author)

conference paper 2007