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Prewett, Philip D. (author), Hagen, C.W. (author), Lenk, Claudia (author), Lenk, Steve (author), Kaestner, Marcus (author), Ivanov, Tzvetan (author), Hari, S. (author), Scotuzzi, M. (author), More Authors (author)
Following a brief historical summary of the way in which electron beam lithography developed out of the scanning electron microscope, three state-of-the-art charged-particle beam nanopatterning technologies are considered. All three have been the subject of a recently completed European Union Project entitled "Single Nanometre Manufacturing:...
review 2018