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Van Turnhout, M. (author)
A major problem in optical system design is that the optical merit function landscape is usually very complicated, especially for complex design problems where many minima are present. Finding good new local minima is then a difficult task. We show however that a certain degree of order is present in the optical design space, which is best...
doctoral thesis 2009
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Bociort, F. (author), Van Turnhout, M. (author), Marinescu, O. (author)
Saddle-point construction (SPC) is a new method to insert lenses into an existing design. With SPC, by inserting and extracting lenses new system shapes can be obtained very rapidly, and we believe that, if added to the optical designer’s arsenal, this new tool can significantly increase design productivity in certain situations. Despite the...
conference paper 2007
document
Van Turnhout, M. (author), Bociort, F. (author)
Local optimization algorithms, when they are optimized only for speed, have in certain situations an unpredictable behavior: starting points very close to each other lead after optimization to different minima. In these cases, the sets of points, which, when chosen as starting points for local optimization, lead to the same minimum (the so...
conference paper 2007
document
Bociort, F. (author), Van Turnhout, M. (author)
In present-day optical system design, it is tacitly assumed that local minima are points in the merit function landscapewithout relationships between them. We will show however that there is a certain degree of order in the design landscapeand that this order is best observed when we change the dimensionality of the optimization problem and when...
conference paper 2006
document
Marinescu, O. (author), Bociort, F. (author)
Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...
conference paper 2006
document
Bociort, F. (author), Van Turnhout, M. (author)
Finding multiple local minima in the merit function landscape of optical system optimization is a difficult task, especially for complex designs that have a large number of variables. We discuss here a method that enables a rapid generation of new local minima for optical systems of arbitrary complexity. We have recently shown that saddle points...
conference paper 2005
document
Marinescu, O. (author), Bociort, F. (author)
The multidimensional merit function space of complex optical systems contains a large number of local minima that are connected via links that contain saddle points. In this work, we illustrate a method to construct such saddle points with examples of deep UV objectives and extreme UV mirror systems for lithography. The central idea of our...
conference paper 2005
document
Marinescu, O. (author), Bociort, F. (author)
The merit function space of mirror systems for EUV lithography is studied. Local minima situated in a multidimensional merit function space are connected via links that contain saddle points and form a network. In this work we present the first networks for EUV lithographic objectives and discuss how these networks change when control parameters...
conference paper 2005
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