document

Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

Marinescu, O. (author), Bociort, F. (author)

journal article 2008

document

Optimization of multilayer reflectors for extreme ultraviolet lithography

Bal, M.F. (author), Singh, M. (author), Braat, J.J.M. (author)

journal article 2004