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Bociort, F. (author), Van Turnhout, M. (author), Marinescu, O.E. (author)
Optimization of a projection system is performed to obtain a starting configuration that is at a local minimum of the merit function or simply a previously known minimum system is used as the starting configuration. A zero-thickness meniscus lens is inserted at a surface in the local minimum starting configuration with N surfaces to construct a...
patent 2007
document
Botsuioruto, F. (author), Van Turnhout, M. (author), Marinescu, O.E. (author)
PROBLEM TO BE SOLVED: To provide a method of designing a projection system for a lithography projection apparatus, to provide a lithography apparatus comprising the projection system, and to provide a method for manufacturing a device by using the projection system. ; SOLUTION: In the first place, local optimization of the projection system is...
patent 2007
document
Van Turnhout, J. (author)
PCT No. PCT/NL97/00102 Sec. 371 Date Oct. 20, 1998 Sec. 102(e) Date Oct. 20, 1998 PCT Filed Mar. 3, 1997 PCT Pub. No. WO97/33950 PCT Pub. Date Sep. 18, 1997A device for storing and gradually dispensing heat or cold includes a container having a partially heat-conducting wall enclosing a space with material having a high heat capacity including a...
patent 2000
document
Van Turnhout, J. (author), Boersma, A. (author)
The processor measures complex permittivity as a function of two or more frequencies of the field at a given temperature, and determines at least one parameter chosen from form, dimension, volume fraction, co-continuous fraction of the second phase and Debye length of the charge layer. A measuring device for the properties of a multi-phase...
patent 2000
document
Van Turnhout, J. (author), Schulpen, W.R. (author), Law, J.R. (author), Schmit, G.B. (author)
A hydrophilic gel-forming polymer is used in combination with water as a fire extinguisher.
patent 1999
document
Van Turnhout, J. (author)
A device for storing and gradually dispensing heat or cold is described, comprising a container having an at least partially heat-conducting wall which encloses a space in which a material having a high heat capacity is present, formed by a hydrophilic polymer which contains or is able to contain 50-99.5 wt.% of water, based on the sum of...
patent 1997
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