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Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...
conference paper 2006