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Serebriakov, A. (author), Bocoirt, F. (author), Braat, J. (author)
journal article 2005
Serebriakov, A.G. (author)
This thesis has been devoted to two main subjects: the compensation of birefringence induced by spatial dispersion (BISD) in Deep-UV lithographic objectives and the optimization of optical systems in general.
doctoral thesis 2005