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Braat, J.J.M. (author), Dirksen, P. (author), Janssen, A.J.E.M. (author), Van Haver, S. (author), Van de Nes, A.S. (author)
The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer–Zernike theory allows the retrieval of the complex pupil function of the imaging system,...
journal article 2005
document
Braat, J.J.M. (author), Dirksen, P. (author), Janssen, A.J.E.M. (author), Van de Nes, A.S. (author)
Poster presentation with Philips Research Laboratories
journal article 2004