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document
Post, J. (author), Koutamanis, A. (author)
conference paper 2005
document
De Borst, R. (author), Van den Boogaard, A.H. (author)
conference paper 1995
document
Schellekens, J.C.J. (author), De Borst, R. (author)
conference paper 1991
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Breen, J. (author), Van Dijk, T. (author)
conference paper 1997
document
Koutamanis, A. (author), Den Hartog, P. (author)
conference paper 2001
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Van Der Does, J. (author), Giro, H. (author)
conference paper 1997
document
Feenstra, P.H. (author), De Borst, R. (author), Rots, J.G. (author)
conference paper 1991
document
Post, J. (author), Koutamanis, A. (author)
conference paper 2007
document
Breen, J.L.H. (author), Stellingwerff, M.C. (author)
conference paper 1997
document
Den Hartog, J.P. (author), Koutamanis, A. (author)
conference paper 2000
document
Koutamanis, A. (author)
conference paper 1995
document
Urbano Merino, J. (author), De Lima, H.A. (author), Hanjalic, A. (author)
Statistical significance testing is widely accepted as a means to assess how well a difference in effectiveness reflects an actual difference between systems, as opposed to random noise because of the selection of topics. According to recent surveys on SIGIR, CIKM, ECIR and TOIS papers, the t-test is the most popular choice among IR researchers....
conference paper 2019
document
Verduin, T. (author), Lokhorst, S.R. (author), Hagen, C.W. (author), Kruit, P. (author)
We have developed a fast three dimensional Monte-Carlo framework for the investigation of shotnoise induced side-wall roughness (SWR) formation. The calculation outline is demonstrated by an example for an exposure of a 100nm thick layer of negative tone resist (NTR) resist on top of an infinitely thick silicon substrate. We use our home...
conference paper 2016
document
Bolten, Jens (author), Arat, K.T. (author), Ünal, Nezih (author), Porschatis, Caroline (author), Wahlbrink, Thorsten (author), Lemme, Max C. (author)
In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...
conference paper 2017
document
Papachristos, G. (author), van de Kaa, G. (author)
There is considerable research on platform market competition. However, there is significantly less research on governance of the preceding stage of platform development prior to market launch. This paper proposes that the avalanche game is an appropriate metaphor for this. A typical platform development process is outlined and the...
conference paper 2016
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Jensen, T. (author), Chappin, E.J.L. (author)
Agent-based modeling is useful to simulate the human role in socio-technical systems. Thereby, the complexity of such systems can be captured. For instance, it has shown to be useful at simulating innovation in socio-technical systems. We develop a next step in which laborious model building is automated. We present a working example on...
conference paper 2016
document
van der Vegte, W.F. (author), Kurt, Fatih (author), Şengöz, Oğuz Kerem (author)
Today’s connected products increasingly allow us to collect and analyze information on how they are actually used. An engineering activity where usage data can prove particularly useful, and be converted to actionable engineering knowledge, is simulation: user behavior is often hard to model, and collected data representing real user...
conference paper 2018
document
Augusto da Silva, F. (author), Bagbaba, Ahmet Cagri (author), Hamdioui, S. (author), Sauer, Christian (author)
This work aims at an alternative method to verify the correctness of Fault Lists generated by fault simulators tools in context of safety verification. The lists generated by simulation tools are verified against lists from formal tools. The consistency evaluation between the lists supports the Tool Confidence Level (TCL) assessment, defined in...
conference paper 2018
document
Lu, Z. (author), Shyrokau, B. (author), Boulkroune, Boulaid (author), Van Aalst, Sebastiaan (author), Happee, R. (author)
Although extensive research has been conducted to design path-following algorithms for automated vehicles, the cross comparison between different path-following controllers is still weakly-analyzed. Therefore, we benchmarked five path-following algorithms to evaluate their performance according to various disturbances like gust wind, drop of...
conference paper 2018
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Ma, X (author), Kato, Y (author), van Kempen, F.C.M. (author), Hirai, Y (author), Tsuchiya, T (author), van Keulen, A. (author), Tabata, O (author)
We report a multiple patterning approach utilizing digital-micromirror-device (DMD)-based grayscale lithography, providing a solution to improve fabrication accuracy for entire target three-dimensional structure. Because DMD-based lithography system consists a projection lens system, better resolution can be obtained around focal position...
conference paper 2015
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