document

Laser vapor phase synthesis of submicron silicon and silicon nitride powders from halogenated silanes

Bauer, R.A. (author), Smulders, R. (author), Geus, E.R. (author), Van der Put, P.J. (author), Becht, J.G.M. (author), Schoonman, J. (author)

conference paper 1988

document

Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes

Bauer, R.A. (author), Smulders, R. (author), Becht, J.G.M. (author), Van der Put, P.J. (author), Schoonman, J. (author)

journal article 1989