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Wu, H. (author), Emadi, A. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
A thermopile-based detector array for use in a miniaturized Infrared (IR) spectrometer has been designed and fabricated using CMOS compatible MEMS technology. The emphasis is on the optimal of the detector array at the system level, while considering the thermal design, the dimensional constraints of a design on a chip and the CMOS compatibility...
conference paper 2010
document
Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
This paper reports on a CMOS-Compatible Linear Variable Optical Filter (LVOF) visible micro-spectrometer. The CMOS-compatible post process for fabrication of the LVOF has been used for integration of the LVOF with a CMOS chip containing a 128-element photodiode array and readout circuitry. Fabrication of LVOF involves a process for fabrication...
conference paper 2010
document
Wu, H. (author), Emadi, A. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
The miniaturized IR spectrometer discussed in this paper is comprised of: slit, planar imaging diffraction grating and Thermo-Electric (TE) detector array, which is fabricated using CMOS compatible MEMS technology. The resolving power is maximized by spacing the TE elements at an as narrow as possible pitch, which is limited by processing...
conference paper 2010
document
Emadi, A. (author), Grabarnik, S. (author), Wu, H. (author), De Graaf, G. (author), Hedsten, K. (author), Enoksson, P. (author), Correia, J.H. (author), Wolffenbuttel, R.F. (author)
This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist...
conference paper 2010
document
Grabarnik, S. (author), Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Vdovin, G. (author), Wolffenbutter, R.F. (author)
The design and performance of a highly miniaturized spectrometer fabricated using MEMS technologies are reported in this paper. Operation is based on an imaging diffraction grating. Minimizing fabrication complexity and assembly of the micromachined optical and electronic parts of the microspectrometer implies a planar design. It consists of two...
conference paper 2008
document
Wu, H. (author), Vollebregt, S. (author), Emadi, A. (author), De Graaf, G. (author), Ishihara, R. (author), Wolffenbuttel, R.F. (author)
A thermopile based detector array has advantages when used for an infrared (IR) micro-spectrometer, as compared to an array of photon detector, such as flat spectral response and uncooled operation. A thermal detector requires a good absorber to achieve a high absorption coefficient in the spectral range of interest. Several solutions are...
journal article 2011
document
Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
This paper presents the design, fabrication and characterization of Infra-Red (IR) Linear Variable Optical Filter (LVOF)-based micro-spectrometers. Two LVOF microspectrometer designs have been realized: one for operating in the 1400 nm to 2500 nm wavelength range and another between 3000 nm and 5000 nm. The IR LVOFs have been fabricated in an IC...
journal article 2013
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