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Joshi, S. (author), Savov, A.M. (author), Shafqat, Salman (author), Dekker, R. (author)
The authors found that oxygen plasma etching of polyimide (PI) with aluminum (Al) as a hard-etch mask results in lightly textured arbitrary shaped “fur-like” residues. Upon investigation, the presence of Al was detected in these residues. Ruling out several causes of metal contamination that were already reported in literature, a new theory for...
journal article 2018