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Zandbergen, H.W. (author), Tichelaar, F.D. (author), Alkemade, P.F.A. (author)
A method for the formation of nanometer-scale electrodes, wherein strip of electrically conductive material, in particular metal, is provided with a longitudinal direction, a width direction and a thickness direction and then, with the aid of an electron beam, a groove is provided in a top surface of the strip, in the width direction of the...
patent 2006