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Van Veldhuizen, S. (author), Vuik, C. (author), Kleijn, C.R. (author)
In this study various numerical schemes for transient simulations of 2D laminar reacting gas flows, as typically found in Chemical Vapor Deposition (CVD) reactors, are proposed and compared. These systems are generally modeled by means of many stiffly coupled elementary gas phase reactions between a large number of reactants and intermediate...
report 2006
document
Van Veldhuizen, S. (author), Vuik, C. (author), Kleijn, C.R. (author)
In this study various numerical schemes for simulating 2D laminar reacting gas flows, as typically found in Chemical Vapor Deposition (CVD) reactors, are proposed and compared. These systems are generally modeled by means of many stiffly coupled elementary gas phase reactions between a large number of reactants and intermediate species. The...
report 2006
document
Van Veldhuizen, S. (author), Vuik, C. (author), Kleijn, C.R. (author)
report 2007
document
Van Veldhuizen, S. (author), Vuik, C. (author), Kleijn, C.R. (author)
report 2008
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