Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling...

Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program

A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coordinates of sampling locations and of the intensity sampled at each sampling location; and...