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Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Bociort, F. (author), Van Turnhout, M. (author)
In present-day optical system design, it is tacitly assumed that local minima are points in the merit function landscapewithout relationships between them. We will show however that there is a certain degree of order in the design landscapeand that this order is best observed when we change the dimensionality of the optimization problem and when...
conference paper 2006
document
Marinescu, O. (author), Bociort, F. (author)
Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...
conference paper 2006
document
Serebriakov, A.G. (author)
This thesis has been devoted to two main subjects: the compensation of birefringence induced by spatial dispersion (BISD) in Deep-UV lithographic objectives and the optimization of optical systems in general.
doctoral thesis 2005
document
Bociort, F. (author), Van Turnhout, M. (author)
Finding multiple local minima in the merit function landscape of optical system optimization is a difficult task, especially for complex designs that have a large number of variables. We discuss here a method that enables a rapid generation of new local minima for optical systems of arbitrary complexity. We have recently shown that saddle points...
conference paper 2005
document
Marinescu, O. (author), Bociort, F. (author)
The multidimensional merit function space of complex optical systems contains a large number of local minima that are connected via links that contain saddle points. In this work, we illustrate a method to construct such saddle points with examples of deep UV objectives and extreme UV mirror systems for lithography. The central idea of our...
conference paper 2005
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