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Janssen, G.C.A.M. (author), Dammers, A.J. (author), Sivel, V.G.M. (author), Wang, W.R. (author)
Thin films on substrates are usually in a stressed state. An important, but trivial, contribution to that stress stems from the difference in thermal expansion coefficient of substrate and film. Much more interesting are the intrinsic stresses, resulting from the growth and/or microstructure of the film. Intrinsic compressive stress was...
journal article 2003