Searched for:
(1 - 5 of 5)
document
Marinescu, O.E. (author), Bociort, F. (author), Braat, J.J.M. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO
journal article 2005
document
Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO
journal article 2005
document
Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)
When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...
conference paper 2004
document
Braat, J.J.M. (author), Bociort, F. (author), Marinescu, O.E. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
document
Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
Searched for:
(1 - 5 of 5)