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document: Extended Nijboer–Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system
Braat, J.J.M. (author), Dirksen, P. (author), Janssen, A.J.E.M. (author), Van Haver, S. (author), Van de Nes, A.S. (author)
The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer–Zernike theory allows the retrieval of the complex pupil function of the imaging system,...
journal article 2005

document: Enhanced imaging in Extreme UV lithography by optimising the Molybdenum/Silicon thickness ratio in 2-D phase shifting mask design
Braat, J.J.M. (author), Nugrowati, A.M. (author), Van de Nes, A.S. (author), Pereira, S.F. (author)
Poster presentation Optics Research Group TU Delft
journal article 2005

document: Complex pupil function reconstruction at high numerical aperture using the extended Nijboer-Zernike diffraction theory
Braat, J.J.M. (author), Dirksen, P. (author), Janssen, A.J.E.M. (author), Van de Nes, A.S. (author)
Poster presentation with Philips Research Laboratories
journal article 2004