Searched for:
(1 - 1 of 1)
document
Krieg, M.L. (author), Braat, J.J.M. (author)
A previously reported interferometer without intermediate optics is used to perform measurements on an aspherical extreme ultraviolet lithography mirror substrate. Acousto-optic modulation based phase shifting is used together with a novel phase retrieval algorithm to retrieve the phase distribution from our interferograms. The phase...
conference paper 2005