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Sadeghian, H. (author), Yang, C.K. (author), Bossche, A. (author), French, P.J. (author), Goosen, J.F.L. (author), Van Keulen, A. (author)
A method for determining a spring constant k for a deformable probe element (102) of a scanning probe microscope SPM (100). The probe (102) has an outer surface area consisting of a tip area (112) on a first probe side (108) and a tip-less area (113). The probe (102) also has a probe electrode (114) and a scanning probe tip (104) in the tip area...
patent 2012