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Sadeghian, H. (author), Yang, C.K. (author), Gavan, K.B. (author), Goosen, J.F.L. (author), Van der Drift, E.W.J.M. (author), Van der Zant, H.S.J. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author)
Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the sensitivity, and very little attention has been focused on effects-induced errors. Among these effects, the surface effects...
journal article 2010
document
Sadeghian, H. (author), Yang, C.K. (author), Goosen, J.F.L. (author), Van der Drift, E. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author)
This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young’s Modulus ? ( ~170–70?GPa) of [110] silicon nanocantilevers (thickness ~1019–40?nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems...
journal article 2009