Minimizing tip-sample forces and enhancing sensitivity in atomic force microscopy with dynamically compliant cantilevers

Due to the harmonic motion of the cantilever in Tapping Mode Atomic Force Microscopy, it is seemingly impossible to estimate the tip-sample interactions from the motion of the cantilever. Not directly observing the interaction force, it is possible to damage the surface or the tip by applying an excessive mechanical load. The tip-sample...

A new horizon: Using heat to measure distance in high performance metrology solutions

Towards an effective reduction of intensity noise in laser diodes

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

Reduction of laser diode intensity noise in optical beam defection systems

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

Quantitative measurement of tip-sample interaction forces in tapping mode atomic force microscopy

Helium-ion-beam-induced growth of 3-dimensional AFM probes

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...

Transient tip-sample interactions in high-speed AFM imaging of 3D nano structures

The maximum amount of repulsive force applied to the surface plays a very important role in damage of tip or sample in Atomic Force Microscopy(AFM). So far, many investigations have focused on peak repulsive forces in tapping mode AFM in steady state conditions. However, it is known that AFM could be more damaging in transient conditions. In...

A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points

One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of the mechanical scanning stage, especially in the vertical (z) direction. According to the design principles of “light and stiff” and “static determinacy,” the bandwidth of the mechanical scanner is limited by the first eigenfrequency of the AFM...

Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot...

High-throughput parallel SPM for metrology, defect, and mask inspection

Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our...

Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review

With the device dimensions moving towards the 1X node, the semiconductor industry is rapidly approaching the point where 10 nm defects become critical. Therefore, new methods for improving the yield are emerging, including inspection and review methods with sufficient resolution and throughput. Existing industrial tools cannot anymore fulfill...

Mechanics of Ultra-sensitive Nanoelectromechanical Silicon Cantilevers: A Combined Experimental-Theoretical Approach