Double Zernike expansion of the optical aberration function from its power series expansion

Various authors have presented the aberration function of an optical system as a power series expansion with respect to the ray coordinates in the exit pupil and the coordinates of the intersection point with the image field of the optical system. In practical applications, for reasons of efficiency and accuracy, an expansion with the aid of...

Vectorial aerial-image computations of three-dimensional objects based on the extended Nijboer–Zernike theory

We present details of a novel imaging algorithm based on the extended Nijboer–Zernike (ENZ) theory of diffraction. We derive integral expressions relating the electric field distribution in the entrance pupil of an optical system to the electric field in its focal region. The evaluation of these integrals is made possible by means of a highly...

Estimating resist parameters in optical lithography using the extended Nijboer-Zernike theory

Extended Nijboer–Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer–Zernike theory allows the retrieval of the complex pupil function of the imaging system,...

Complex pupil function reconstruction at high numerical aperture using the extended Nijboer-Zernike diffraction theory

Poster presentation with Philips Research Laboratories