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Ishihara, R. (author), Van de Zwan, M. (author), Trifunovic, M. (author)Methods for manufacture of a submicron semiconductor structure on a substrate are described. The method may comprise: forming at least one template layer over a support substrate; forming one or more template structures, preferably one or more recesses and/or mesas, in said template layer, said one or more template structures comprising one or...patent 2014