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Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
The authors report the results of investigating two models for ion-beam-induced deposition (IBID). These models describe IBID in terms of the impact of secondary electrons and of sputtered atoms, respectively. The yields of deposition, sputtering, and secondary electron emission, as well as the energy spectra of the secondary electrons were...
journal article 2009