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Xu, Xiaosi (author), Konijnenberg, A.P. (author), Pereira, S.F. (author), Urbach, Paul (author)
Coherent Fourier scatterometry is an optical metrology technique that utilizes the measured intensity of the scattered optical field to reconstruct certain parameters of test structures written on a wafer with nano-scale accuracy. The intensity of the scattered field is recorded with a camera and this information is used to retrieve the...
journal article 2017
document
Mann, Daniel (author), Nascimento Duplat, D. (author), Keul, Helmut (author), Möller, Martin (author), Verheijen, Marcel (author), Xu, M. (author), Urbach, Paul (author), Adam, A.J.L. (author), Buskens, Pascal (author)
Au and Ag nanoshells are of interest for a wide range of applications. The plasmon resonance of such nanoshells is the property of interest and can be tuned in a broad spectral regime, ranging from the ultraviolet to the mid-infrared. To date, a large number of manuscripts have been published on the optics of such nanoshells. Few of these,...
journal article 2016
document
Xu, M. (author), De Boer, D.K.G. (author), Van Heesch, C.M. (author), Wachters, A.J.H. (author), Urbach, H.P. (author)
Polarization gratings can be realized by polarization holographic recording in photoanisotropic materials. In this paper, we study two types of polarization gratings. One is recorded with two orthogonally circularly (OC) polarized beams and the other one with two orthogonally linearly (OL) polarized beams. The interference of both cases is...
journal article 2010
document
Sluijter, M. (author), Xu, M. (author), Urbach, H.P. (author), De Boer, D.K.G. (author)
We study the applicability of geometrical optics to inhomogeneous dielectric nongyrotropic optically anisotropic media typically found in in-plane liquid-crystal configurations with refractive indices no=1.5 and ne=1.7. To this end, we compare the results of advanced ray- and wave-optics simulations of the propagation of an incident plane wave...
journal article 2010
document
Xu, M. (author), De Sio, L. (author), Caputo, R. (author), Umeton, C.P. (author), Wachters, A.J.H. (author), De Boer, D.K.G. (author), Urbach, H.P. (author)
Recently, a novel holographic diffraction grating made of polymer slices alternated to homogeneous films of nematic liquid crystal (POLICRYPS) was realized. We study the optical performance of the POLICRYPS gratings by both numerical simulations and experiments. Characterization of the grating at normal and conical reading mount are performed....
journal article 2008
document
Xu, M. (author), Urbach, H.P. (author), De Boer, D.K.G. (author)
A color and polarization separating backlight can be obtained by using a surface-relief grating made of birefringent material as an outcoupling structure on top of the lightguide. A rigorous finite element diffraction model was applied to study the polarization effect of such a grating. The diffraction of plane waves by the anisotropic grating...
journal article 2007
document
De Boer, D.K.G. (author), Urbach, H.P. (author), Xu, M. (author)
Poster presentation Optics Research Group TU Delft in cooperation with Philips and STW
journal article 2006
document
Xu, M. (author), Urbach, H.P. (author), De Boer, D.K.G. (author), Cornelissen, H.J. (author)
The application of wire grid polarizers as efficient polarizing beam splitters for visible light is studied. The large differences between the transmissivity for different polarizations are explained qualitatively by using the theory of metallic wave guides. The results of rigorous calculations obtained by using the finite element method are...
journal article 2005
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