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Rosenberg, S.G. (author), Landheer, K. (author), Hagen, C.W. (author), Fairbrother, D.H. (author)
Using three different precursors [MeCpPtMe3, Pt(PF3)4, and W(CO)6], an ultra-high vacuum surface science approach has been used to identify and rationalize the effects of substrate temperature and electron fluence on the chemical composition and bonding in films created by electron beam induced deposition (EBID). X-ray photoelectron spectroscopy...
journal article 2012
document
Ramanandan, G.K.P. (author), Ramakrishnan, G. (author), Planken, P.C.M. (author)
Terahertz (THz) transmission spectroscopy is used to measure the oxidation kinetics of copper thin films evaporated on silicon substrates. The transmission of broadband THz pulses from 1 to 7 THz through the copper film is measured while it gets oxidized at an elevated temperature in ambient air. The change in the transmitted THz electric field...
journal article 2012