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Chemical Vapor Precipitation of Submicron Titanium Nitride Powder
Particle-precipitation-aided chemical vapor deposition of titanium nitride
Vapour-phase synthesis of titanium nitride powder
Chemical vapor deposition of titanium diboride using boron tribromide, titanium tetrachloride, and hydrogen
A kinetic study of titanium nitride chemical vapor deposition using nitrogen, hydrogen, and titanium tetrachloride
Chemical vapour infiltration of TiB2 and TiN in porous Al2O3
Gas-to-particle conversion in the particle precipitation-aided chemical vapor deposition process. I: Synthesis of the binary compound titanium nitride. The role of aerosols in materials processing
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