Estimating Step Heights from Top-Down SEM Images

Scanning electron microscopy (SEM) is one of the most common inspection methods in the semiconductor industry and in research labs. To extract the height of structures using SEM images, various techniques have been used, such as tilting a sample, or modifying the SEM tool with extra sources and/or detectors. However, none of these techniques...

Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: And how to tackle them using computational techniques

In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...

What are the Success Factors for Profiting from Innovation in the Emerging Airborne Wind Energy Industry?: A Competition Analysis in the Face of Innovation

Airborne wind energy at the Technical University Munich

Policy analysis of water management for the Netherlands. Vol IX: Assessment of impacts on shipping and lock operation

This volume discusses the data, methodology, results, and conclusions relevant to each aspect of the study. Chapter 2 describes inland shipping operations in the Netherlands and their importance to Western Europe. Chapter 3 discusses shipping costs and the problem of defining what cost elements should be considered in the analysis. Chapter 4...

Protecting an estuary from floods: A policy analysis of the Oosterschelde. Vol 1: Summary report

The first volume in a series of reports describing the methodology and results of a joint research venture between RAND and the Netherlands Rijkswaterstaat. The POLANO project was founded to help the Dutch government analyze the different alternatives (open, closed, and storm-surge barrier cases) for protecting the Oosterschelde region from...

Protecting an estuary from floods: A policy analysis of the Oosterschelde. Vol 4: Assessment of algae blooms, a potential ecological disturbance

The fourth volume in a series of reports describing the methodology and results of a joint research venture between RAND and the Netherlands Rijkswaterstaat. The POLANO project was founded to help the Dutch government analyze the different alternatives (open, closed, and storm-surge barrier cases) for protecting the Oosterschelde region from...