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Van Dorp, W.F. (author), Wnuk, J.D. (author), Gorham, J.M. (author), Fairbrother, D.H. (author), Madey, T.E. (author), Hagen, C.W. (author)
The total cross section has been measured for the electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV) [MeCpPt(IV)Me3], a Pt precursor often used in focused electron beam induced processing (FEBIP), for incident electron energies ranging between 3–3 keV. Measurements were performed for the precursor in the adsorbed...
journal article 2009