Self-aligned micro-optic integrated photonic platform

In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45^◦ reflecting mirror that directs the light from the interferometer to the collimator....

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

We fabricated horizontal slot waveguides using two low temperature deposition techniques ensuring the full compatibility of the processes with CMOS technology. Slots width as thin as 45 nm with smooth slot surfaces can easily be fabricated with simple photolithographic steps. Fundamental TM-like slot mode in which the E-field is greatly enhanced...

Miniature 10 kHz thermo-optic delay line in silicon

The scanning delay line is a key component of time-domain optical coherence tomography systems. It has evolved since its inception toward higher scan rates and simpler implementation. However, existing approaches still suffer from drawbacks in terms of size, cost, and complexity, and they are not suitable for implementation using integrated...

Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible

Optical Coherence Tomography (OCT) has found applications in many fields of medicine and has a large potential for the optical biopsy of tumors. One of the technological challenges impairing faster adoption of OCT is the relative complexity of the optical instrumentation required, which translates into expensive and bulky setups. In this paper...