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van Neer, P.L.M.J. (author), Quesson, B. (author), van Es, M.H. (author), Van Riel, M. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Piras, D. (author), Duivenoorde, T. (author), Lans, M. (author), Sadeghian, H. (author)
The characterization of buried nanoscale structures nondestructively is an important challenge in a number of applications, such as defect detection and metrology in the semiconductor industry. A promising technique is Subsurface Scanning Probe Microscopy (SSPM), which combines ultrasound with Atomic Force Microscopy (AFM). Initially, SSPM...
journal article 2019
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Keyvani Janbahan, A. (author), Sadeghian, Hamed (author), Goosen, J.F.L. (author), van Keulen, A. (author)
The origin of amplitude reduction in Tapping Mode Atomic Force Microscopy (TM-AFM) is typically attributed to the shift in resonance frequency of the cantilever due to the nonlinear tip-sample interactions. In this paper, we present a different insight into the same problem which, besides explaining the amplitude reduction mechanism, provides...
journal article 2018
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Keyvani Janbahan, A. (author), Alijani, F. (author), Sadeghian, Hamed (author), Maturova, Klara (author), Goosen, J.F.L. (author), van Keulen, A. (author)
This paper investigates the closed-loop dynamics of the Tapping Mode Atomic Force Microscopy using a new mathematical model based on the averaging method in Cartesian coordinates. Experimental and numerical observations show that the emergence of chaos in conventional tapping mode AFM strictly limits the imaging speed. We show that, if the...
journal article 2017
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Keyvani, A. (author), Sadeghian, H. (author), Goosen, J.F.L. (author), van Keulen, A. (author)
abstract 2016
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Nanda, G. (author), Van Veldhoven, E. (author), Maas, D. (author), Sadeghian, H. (author), Alkemade, P.F.A. (author)
The authors report the direct-write growth of hammerhead atomic force microscope(AFM) probes by He+beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the...
journal article 2015
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Sadeghian, H. (author), Van Keulen, F. (author), Goosen, H. (author)
Nowadays, mechanical designers and engineers of elastic structures at ultra-small scales face an interesting challenge; traditional flexures with several components, mechanical joints/ welds and linkages are almost impossible to manufacture with existing microsystem fabrication technologies. Therefore, the majority of mechanical components,...
book chapter 2013
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Sadeghian, H. (author), Yang, C.K. (author), Bossche, A. (author), French, P.J. (author), Goosen, J.F.L. (author), Van Keulen, A. (author)
A method for determining a spring constant k for a deformable probe element (102) of a scanning probe microscope SPM (100). The probe (102) has an outer surface area consisting of a tip area (112) on a first probe side (108) and a tip-less area (113). The probe (102) also has a probe electrode (114) and a scanning probe tip (104) in the tip area...
patent 2012
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Sadeghian, H. (author), Goosen, H. (author), Bossche, A. (author), Thijsse, B. (author), Van Keulen, F. (author)
Recent measurements have indicated that the elastic behaviour of silicon nanocantilevers and nanowires is size-dependent. Several theoretical models have been proposed to explain this phenomenon, mainly focused on surface stress effects. However, discrepancies are found between experiments and theories, indicating that there could be other...
journal article 2011
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Sadeghian, H. (author), Yang, C.K. (author), Gavan, K.B. (author), Goosen, J.F.L. (author), Van der Drift, E.W.J.M. (author), Van der Zant, H.S.J. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author)
Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the sensitivity, and very little attention has been focused on effects-induced errors. Among these effects, the surface effects...
journal article 2010
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Sadeghian, H. (author), Yang, C.K. (author), Goosen, J.F.L. (author), Bossche, A. (author), Staufer, U. (author), French, P.J. (author), Van Keulen, F. (author)
The size-dependent elastic behavior of silicon nanocantilevers and nanowires, specifically the effective Young’s modulus, has been determined by experimental measurements and theoretical investigations. The size dependence becomes more significant as the devices scale down from micro- to nano-dimensions, which has mainly been attributed to...
journal article 2010
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Sadeghian, H. (author), Goosen, J.F.L. (author), Bossche, A. (author), Van Keulen, F. (author)
In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molecular adsorption, there exists a surface stress and a surface...
journal article 2009
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Sadeghian, H. (author), Yang, C.K. (author), Goosen, J.F.L. (author), Van der Drift, E. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author)
This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young’s Modulus ? ( ~170–70?GPa) of [110] silicon nanocantilevers (thickness ~1019–40?nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems...
journal article 2009
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Sadeghian, H. (author), Goosen, J.F.L. (author), Bossche, A. (author), Van Keulen, F. (author)
Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper...
conference paper 2008
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