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Ma, X (author), Kato, Y (author), van Kempen, F.C.M. (author), Hirai, Y (author), Tsuchiya, T (author), van Keulen, A. (author), Tabata, O (author)We report a multiple patterning approach utilizing digital-micromirror-device (DMD)-based grayscale lithography, providing a solution to improve fabrication accuracy for entire target three-dimensional structure. Because DMD-based lithography system consists a projection lens system, better resolution can be obtained around focal position...conference paper 2015
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Jensen, T. (author), Chappin, E.J.L. (author)Agent-based modeling is useful to simulate the human role in socio-technical systems. Thereby, the complexity of such systems can be captured. For instance, it has shown to be useful at simulating innovation in socio-technical systems. We develop a next step in which laborious model building is automated. We present a working example on...conference paper 2016
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Papachristos, G. (author), van de Kaa, G. (author)Platform competition for market share can have broad ranging implications within or across industry sectors. It is subject to the complex and changing socioeconomic context in which it unfolds. Three trends provide evidence for this: (i) the number of relevant factors for platform market dominance is steadily increasing, (ii) industries...conference paper 2016
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Papachristos, G. (author), van de Kaa, G. (author)There is considerable research on platform market competition. However, there is significantly less research on governance of the preceding stage of platform development prior to market launch. This paper proposes that the avalanche game is an appropriate metaphor for this. A typical platform development process is outlined and the...conference paper 2016
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Verduin, T. (author), Lokhorst, S.R. (author), Hagen, C.W. (author), Kruit, P. (author)We have developed a fast three dimensional Monte-Carlo framework for the investigation of shotnoise induced side-wall roughness (SWR) formation. The calculation outline is demonstrated by an example for an exposure of a 100nm thick layer of negative tone resist (NTR) resist on top of an infinitely thick silicon substrate. We use our home...conference paper 2016
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Bolten, Jens (author), Arat, K.T. (author), Ünal, Nezih (author), Porschatis, Caroline (author), Wahlbrink, Thorsten (author), Lemme, Max C. (author)In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...conference paper 2017
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Roungas, V. (author), Meijer, S.A. (author), Verbraeck, A. (author)The complexity of modern systems has made the use of simulations paramount, in order to test different scenarios in an affordable, ethical, and risk-free way. As such, simulations need to be validated, ensuring that the obtained results are meaningful. But validation apart from the computational difficulties, bears several other problems. The...conference paper 2018
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Augusto da Silva, F. (author), Bagbaba, Ahmet Cagri (author), Hamdioui, S. (author), Sauer, Christian (author)This work aims at an alternative method to verify the correctness of Fault Lists generated by fault simulators tools in context of safety verification. The lists generated by simulation tools are verified against lists from formal tools. The consistency evaluation between the lists supports the Tool Confidence Level (TCL) assessment, defined in...conference paper 2018
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Campos Martins, G. (author), Serdijn, W.A. (author)In this paper we present the design and simulation results of an RF energy harvesting circuit that operates across a wide range of available input power, from -27 dBm to 6 dBm. The system comprises an adaptive impedance matching network, a single-stage cross-connected differential rectifier, a start-up charge pump, an adaptive buck-boost...conference paper 2018