"uuid","repository link","title","author","contributor","publication year","abstract","subject topic","language","publication type","publisher","isbn","issn","patent","patent status","bibliographic note","access restriction","embargo date","faculty","department","research group","programme","project","coordinates" "uuid:c4486afa-a5e5-48ba-976a-7ecc010d9dba","http://resolver.tudelft.nl/uuid:c4486afa-a5e5-48ba-976a-7ecc010d9dba","Through-membrane electron-beam lithography for ultrathin membrane applications","Neklyudova, M. (TU Delft QN/Zandbergen Lab; Kavli institute of nanoscience Delft); Erdamar, A.K. (TU Delft QN/Zandbergen Lab; Kavli institute of nanoscience Delft); Vicarelli, L. (TU Delft QN/Zandbergen Lab; Kavli institute of nanoscience Delft); Heerema, S.J. (TU Delft BN/Cees Dekker Lab; Kavli institute of nanoscience Delft); Rehfeldt, T. (TU Delft BN/Cees Dekker Lab; Kavli institute of nanoscience Delft); Pandraud, G. (TU Delft Else Kooi Laboratory); Koladouz Esfahani, Z. (TU Delft QN/Zandbergen Lab; Kavli institute of nanoscience Delft); Dekker, C. (TU Delft BN/Cees Dekker Lab; Kavli institute of nanoscience Delft); Zandbergen, H.W. (TU Delft QN/Zandbergen Lab; Kavli institute of nanoscience Delft)","","2017","We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron microscopy experiments. An electron-beam (e-beam) resist is spray-coated on the backside of the membrane in a KOH-etched cavity in silicon which is patterned using through-membrane electron-beam lithography. This is a controlled way to make transparent windows in membranes, whilst the topside of the membrane remains undamaged and retains its flatness. Our approach was optimized for MEMS-based heating chips but can be applied to any chip design. We show two different applications of this technique for (1) fabrication of a nanogap electrode by means of electromigration in thin free-standing metal films and (2) making low-noise graphene nanopore devices.","","en","journal article","","","","","","","","2018-08-09","","Else Kooi Laboratory","QN/Zandbergen Lab","","",""