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Sadeghian, H. (author), Yang, C.K. (author), Bossche, A. (author), French, P.J. (author), Goosen, J.F.L. (author), Van Keulen, A. (author)
A method for determining a spring constant k for a deformable probe element (102) of a scanning probe microscope SPM (100). The probe (102) has an outer surface area consisting of a tip area (112) on a first probe side (108) and a tip-less area (113). The probe (102) also has a probe electrode (114) and a scanning probe tip (104) in the tip area...
patent 2012
document
Rajaraman, V. (author), Pakula, L.S. (author), Yang, H. (author), French, P.J. (author), Sarro, P.M. (author)
Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...
journal article 2011
document
Sadeghian, H. (author), Yang, C.K. (author), Gavan, K.B. (author), Goosen, J.F.L. (author), Van der Drift, E.W.J.M. (author), Van der Zant, H.S.J. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author)
Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the sensitivity, and very little attention has been focused on effects-induced errors. Among these effects, the surface effects...
journal article 2010
document
Sadeghian, H. (author), Yang, C.K. (author), Goosen, J.F.L. (author), Bossche, A. (author), Staufer, U. (author), French, P.J. (author), Van Keulen, F. (author)
The size-dependent elastic behavior of silicon nanocantilevers and nanowires, specifically the effective Young’s modulus, has been determined by experimental measurements and theoretical investigations. The size dependence becomes more significant as the devices scale down from micro- to nano-dimensions, which has mainly been attributed to...
journal article 2010
document
Sadeghian, H. (author), Yang, C.K. (author), Goosen, J.F.L. (author), Van der Drift, E. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author)
This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young’s Modulus ? ( ~170–70?GPa) of [110] silicon nanocantilevers (thickness ~1019–40?nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems...
journal article 2009
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