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Van der Avoort, C. (author), Mieremet, A. (author), Pereira, S. (author), Braat, J. (author)
We present results of experiments obtained using a new nulling technique that enables deep nulling without the use of achromatic phase shifters. The experimental set-up consists of a three-beam interferometer that should provide a nulling depth of several thousands over a wavelength range of 500 to 650 nm. The intended depth of null was not...
conference paper 2004
document
Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)
When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...
conference paper 2004
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Braat, J.J.M. (author), Dirksen, P. (author), Janssen, A.J.E.M. (author), Van de Nes, A.S. (author)
Poster presentation with Philips Research Laboratories
journal article 2004
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Swinkels, B.L. (author), Wendrich, T.J. (author), Bhattacharya, N. (author), Wielders, A.A. (author), Braat, J.J.M. (author)
Space interferometers consisting of several free flying telescopes, such as the planned Darwin mission, require a complex metrology system to make all the components operate as a single instrument. Our research focuses on one of its sub-systems that measures the absolute distance between two satellites with high accuracy. For Darwin the required...
conference paper 2004
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Wang, H. (author), Groen, F.H. (author), Pereira, S.F. (author), Braat, J.J.M. (author)
We present an analysis of the reading capability of a novel optical pickup consisting of a single-mode and a multi-mode rectangular waveguide. According to the simulations, if one has prior information about the structure of the disk, superresolution readout could be achieved. The proposed system has the advantage to be compact and should be...
conference paper 2004
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Musa, S. (author), Pereira, S.F. (author), Braat, J.J.M. (author), Fransoo, F. (author), Van Thourhout, D. (author), Baets, R. (author)
We present a study on the use of optical waveguides in readout units for optical recording. Optical waveguides can be used to increase the storage capacity of optical recording, which is limited by diffraction. Optical waveguides are attractive for application in readout units of optical recording systems because it is possible to make compact...
conference paper 2004
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Voogd, R.J. (author), Singh, M. (author), Braat, J.J.M. (author)
We present a method to optically store multiple information in one location by having angular momentum imparted to the scanning beam by optical phase objects that make up the information areas on a surface. We show that the light beam thus perturbed carries an optical vortex, the rotation of which can be detected in the near-field focal region...
conference paper 2004
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Krieg, M.L. (author), Braat, J.J.M. (author)
This paper will illustrate several approaches to retrieving the shape of aspherical reflective surfaces as used in EUV Lithography, from measurements from a previously reported angstrom-accuracy interferometer. First, the working principles of the interferometer will be reviewed, and typical measurement data expected from the instrument will be...
conference paper 2004
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Dirksen, P. (author), Braat, J. (author), Janssen, A.J.E.M. (author), Leeuwestein, A. (author), Kwinten, H. (author), Van Steenwinckel, D. (author)
This study presents an experimental method to determine the resist parameters that are at the origin of a general blurring of the projected aerial image. The resist model includes the effects of diffusion in the horizontal plane and a second cause for image blur that originates from a stochastic variation of the focus parameter. The used...
conference paper 2004
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Serebriakov, A. (author), Maksimov, E. (author), Bociort, F. (author), Braat, J. (author)
The subject of birefringence induced by spatial dispersion (BISD), also called intrinsic birefringence, recently became an important issue for 157-nm lithography. For the deep UV range, because of intrinsic absorption, only crystalline materials can be used as optical materials for lens manufacturing. The physical properties of crystals are...
conference paper 2004
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Braat, J.J.M. (author), Bociort, F. (author), Marinescu, O.E. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
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Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)
Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy
journal article 2004
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Meeder, M. (author), Mauret, T. (author), Booij, S. (author), Braat, J. (author), Faehnle, O. (author)
The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimising finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that...
conference paper 2003
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Booij, S.M. (author), Fähnle, O.W. (author), Meeder, M. (author), Wons, T. (author), Braat, J.J.M. (author)
A variation on the fluid jet polishing (FJP) technique, arbitrarily named Jules Verne (JV), will be described in this article. Jules Verne is a glass processing technique that removes material due to the fact that the tool and the surface are in close contact, and a slurry moves in between the tool and the surface. This approach has both...
conference paper 2003
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Wang, H. (author), Groen, F.H. (author), Pereira, S.F. (author), Braat, J.J.M. (author)
In photonics, light usually diffracts in all directions when it emerges from a planar optical waveguide. Besides this fact, in this letter we show that a waveguide with a rectangular cross section can be turned to a focusing system by using three-dimensional self-imaging technique. We obtained a configuration where the focus of the field lies...
journal article 2003
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Braat, G.F.M. (author)
doctoral thesis 1993
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Braat, J.J.M. (author)
public lecture 1989
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Braat, A. (author), Markx, G.H. (author)
Document(en) uit de collectie Chemische Procestechnologie.
report 1986
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Braat, R.G. (author)
Document uit de collectie Chemische Procestechnologie
report 1980
document
Braat, R.G. (author), Kingma, E. (author), Punt, A.R. (author)
report 1980
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