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Sadeghian Marnani, H. (author), Herfst, R.W. (author), Van den Dool, T.C. (author), Crowcombe, W.E. (author), Winters, J. (author), Kramer, G.F.I.J. (author)Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our...conference paper 2014
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Sadeghian Marnani, H. (author), Van den Dool, T.C. (author), Crowcombe, W.E. (author), Herfst, R.W. (author), Winters, J. (author), Kramer, G.F.I.J. (author), Koster, N.B. (author)With the device dimensions moving towards the 1X node, the semiconductor industry is rapidly approaching the point where 10 nm defects become critical. Therefore, new methods for improving the yield are emerging, including inspection and review methods with sufficient resolution and throughput. Existing industrial tools cannot anymore fulfill...conference paper 2014
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Westerveld, W.J. (author), Pozo, J. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), Van den Dool, T.C. (author), Leinders, S.M. (author), Van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE6619, 661914 (2007)PSISDG0277-786X10.1117/12.738412] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge....journal article 2012