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Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)The design and CMOS-compatible fabrication of airgap-based optical filters in a surface micromachining process with sacrificial release using thevapour phase is presented. An airgap-dielectric layer combination offers a higher refractive index contrast, as compared to the conventional all-dielectriclayer based filters, which results in a higher...conference paper 2015