Searched for: author:"Chen, P."
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Chen, P. (author), Wu, M.Y. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
We report a new method for the fabrication of sub-10 nm nanopores in a fast single process step. The pore formation is accomplished by exploiting the competition between sputtering and deposition in ion-beam-induced deposition (IBID) on a thin membrane. The pore diameter can be controlled by adjusting the ion beam and gas exposure conditions....
journal article 2008