Estimation and control of large-scale systems with an application to adaptive optics for EUV lithography

Extreme UltraViolet (EUV) lithography is a new technology for production of integrated circuits. In EUV lithographic machines, optical elements are heated by absorption of exposure energy. Heating induces thermoelastic deformations of optical elements and consequently, it creates wavefront aberrations. These Thermally Induced Wavefront...

Predictive control of thermally induced wavefront aberrations

In this paper we experimentally demonstrate the proof of concept for predictive control of thermally induced wavefront aberrations in optical systems. On the basis of the model of thermally induced wavefront aberrations and using only past wavefront measurements, the proposed adaptive optics controller is able to predict and to compensate the...

Identification of a dynamical model of a thermally actuated deformable mirror

Using the subspace identification technique, we identify a finite dimensional, dynamical model of a recently developed prototype of a thermally actuated deformable mirror (TADM). The main advantage of the identified model over the models described by partial differential equations is its low complexity and low dimensionality. Consequently, the...

Iterative learning control of a membrane deformable mirror for optimal wavefront correction

We present an iterative learning control (ILC) algorithm for controlling the shape of a membrane deformable mirror (DM). We furthermore give a physical interpretation of the design parameters of the ILC algorithm. On the basis of this insight, we derive a simple tuning procedure for the ILC algorithm that, in practice, guarantees stable and fast...

An innovative and efficient method to control the shape of push-pull membrane deformable mirror

We carry out performance characterisation of a commercial push and pull deformable mirror with 48 actuators (Adaptica Srl). We present a detailed description of the system as well as a statistical approach on the identification of the mirror influence function. A new efficient control algorithm to induce the desired wavefront shape is also...