Searched for: author:"Hagen, C.W."
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Hari, S. (author), Trompenaars, P. H.F. (author), Mulders, J. J.L. (author), Kruit, P. (author), Hagen, C.W. (author)
High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the lines as a result of the Gaussian line profile. We demonstrate the use of focused electron...
journal article 2021
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Angeloni, L. (author), Ganjian, M. (author), Nouri Goushki, M. (author), Mirzaali Mazandarani, M. (author), Hagen, C.W. (author), Zadpoor, A.A. (author), Fratila-Apachitei, E.L. (author), Ghatkesar, M.K. (author)
Micro- and nano-patterns are gaining increasing attraction in several fields ranging from nanoelectronics to bioengineering. The mechanical properties of the nanostructures (nanopillars, nanotubes, nanowires, etc.) are highly relevant for many applications but challenging to determine. Existing mechanical characterization methods require...
journal article 2021
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Hesam Mahmoudi Nezhad, N. (author), Ghaffarian Niasar, M. (author), Hagen, C.W. (author), Kruit, P. (author)
In electron optics, the design of electron lens systems is still a challenge. To optimize such systems, the objective function which should be calculated, depends on the electric potential distribution in the space created by the lenses. To obtain the electric potential, the existing methods are generally based on some mathematical techniques...
conference paper 2020
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Modaresifar, K. (author), Kunkels, Lorenzo (author), Ganjian, M. (author), Tümer, N. (author), Hagen, C.W. (author), Otten, L.G. (author), Hagedoorn, P.L. (author), Angeloni, L. (author), Ghatkesar, M.K. (author), Fratila-Apachitei, E.L. (author), Zadpoor, A.A. (author)
Recent progress in nano-/micro-fabrication techniques has paved the way for the emergence of synthetic bactericidal patterned surfaces that are capable of killing the bacteria via mechanical mechanisms. Different design parameters are known to affect the bactericidal activity of nanopatterns. Evaluating the effects of each parameter, isolated...
journal article 2020
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Jeevanandam, G. (author), van der Meijden, V. (author), Birnie, L. D. (author), Kruit, P. (author), Hagen, C.W. (author)
To allow researchers to fabricate micro- and nano-devices on a small scale, without having to use complex cleanroom facilities, a single tool is proposed in which a variety of typical cleanroom techniques and processes is combined. This ‘cleanroom’ in SEM tool, based on a scanning electron microscope (SEM), integrates several add-on tools,...
journal article 2020
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van Kessel, L.C.P.M. (author), Huisman, T. (author), Hagen, C.W. (author)
Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. We generate random rough lines and spaces,...
conference paper 2020
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van der Reep, T.H.A. (author), Looman, B.A. (author), Chan, H.W. (author), Hagen, C.W. (author), van der Graaf, H. (author)
We measure the transmission secondary electron yield of nanometer-thick Al2O3/TiN/Al2O3 films using a prototype version of a Timed Photon Counter (TiPC). We discuss the method to measure the yield extensively. The yield is then measured as a function of landing energy between 1.2 and 1.8 keV and found to be in the range of 0.1 (1.2 keV) to 0.9 ...
journal article 2020
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van Kessel, L.C.P.M. (author), Hagen, C.W. (author)
Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with...
journal article 2020
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Arat, K.T. (author), Hagen, C.W. (author)
The sensitivity of simulated scanning electron microscopy (SEM) images to the various physical model ingredients is studied using an accurate, but slow simulator, to identify the most important ingredients to include in a reliable and fast SEM image simulator. The quantum mechanical transmission probability (QT) model and the electron...
journal article 2020
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Ganjian, M. (author), Angeloni, L. (author), Mirzaali Mazandarani, M. (author), Modaresifar, K. (author), Hagen, C.W. (author), Ghatkesar, M.K. (author), Hagedoorn, P.L. (author), Fratila-Apachitei, E.L. (author), Zadpoor, A.A. (author)
One of the methods to create sub-10 nm resolution metal-composed 3D nanopillars is electron beam-induced deposition (EBID). Surface nanotopographies (e.g., nanopillars) could play an important role in the design and fabrication of implantable medical devices by preventing the infections that are caused by the bacterial colonization of the...
journal article 2020
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Mahgoub, M.I.M.A. (author), Lu, Hang (author), Thorman, Rachel M. (author), Preradovic, Konstantin (author), Jurca, Titel (author), McElwee-White, Lisa (author), Fairbrother, Howard (author), Hagen, C.W. (author)
Two platinum precursors, Pt(CO)<sub>2</sub>Cl<sub>2</sub> and Pt(CO)<sub>2</sub>Br<sub>2</sub>, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments...
journal article 2020
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van Kessel, L.C.P.M. (author), Hagen, C.W. (author), Kruit, P. (author)
Background: Monte Carlo simulations of scanning electron microscopy (SEM) images ignore most surface effects, such as surface plasmons. Previous experiments have shown that surface plasmons play an important role in the emission of secondary electrons (SEs).Aim: We investigate the influence of incorporating surface plasmons into simulations...
journal article 2019
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Arat, K.T. (author), Klimpel, Thomas (author), Hagen, C.W. (author)
Background: Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. Aim: In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge....
journal article 2019
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Arat, K.T. (author), Bolten, Jens (author), Zonnevylle, A.C. (author), Kruit, P. (author), Hagen, C.W. (author)
Scanning electron microscopy (SEM) is one of the most common inspection methods in the semiconductor industry and in research labs. To extract the height of structures using SEM images, various techniques have been used, such as tilting a sample, or modifying the SEM tool with extra sources and/or detectors. However, none of these techniques...
journal article 2019
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Widyaratih, Dwisetya S. (author), Hagedoorn, P.L. (author), Otten, L.G. (author), Ganjian, M. (author), Tümer, N. (author), Apachitei, I. (author), Hagen, C.W. (author), Fratila-Apachitei, E.L. (author), Zadpoor, A.A. (author)
Recent discoveries have shown that nanopatterns with feature sizes ≤100 nm could direct stem cell fate or kill bacteria. These effects could be used to develop orthopedic implants with improved osseointegration and decreased chance of implant-associated infections. The quest for osteogenic and bactericidal nanopatterns is ongoing but no...
journal article 2019
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Ganjian, M. (author), Modaresifar, K. (author), Ligeon, Manon R.O. (author), Kunkels, Lorenzo B. (author), Tümer, N. (author), Angeloni, L. (author), Hagen, C.W. (author), Otten, L.G. (author), Hagedoorn, P.L. (author), Apachitei, I. (author), Fratila-Apachitei, E.L. (author), Zadpoor, A.A. (author)
Development of synthetic bactericidal surfaces is a drug-free route to the prevention of implant-associated infections. Surface nanotopographies with specific dimensions have been shown to kill various types of bacterial strains through a mechanical mechanism, while regulating stem cell differentiation and tissue regeneration. The effective...
journal article 2019
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Arat, K.T. (author), Klimpel, Thomas (author), Zonnevylle, A.C. (author), Ketelaars, Wilhelmus S.M.M. (author), Heerkens, C.T.H. (author), Hagen, C.W. (author)
Electron beam lithography (EBL) requires conducting substrates to ensure pattern fidelity. However, there is an increasing interest in performing EBL on less well-conducting surfaces or even insulators, usually resulting in seriously distorted pattern formation. To understand the underlying charging phenomena, the authors use Monte Carlo...
journal article 2019
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Hesam Mahmoudi Nezhad, N. (author), Ghaffarian Niasar, M. (author), Mohammadi Gheidari, A. (author), Hagen, C.W. (author), Kruit, P. (author)
In electrostatic charged particle lens design, optimization of a multi-electrode lens with many free optimization parameters is still quite a challenge. A fully automated optimization routine is not yet available, mainly because the lens potential calculations are often done with very time-consuming methods that require meshing of the lens...
journal article 2019
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van Kessel, L.C.P.M. (author), Hagen, C.W. (author), Kruit, P. (author)
We have investigated the contributions of surface effects to Monte Carlo simulations of top-down scanning electron microscopy (SEM) images. The elastic and inelastic scattering mechanisms in typical simulations assume that the electron is deep in the bulk of the material. In this work, we correct the inelastic model for surface effects. We...
conference paper 2019
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Arat, K.T. (author), Zonnevylle, A.C. (author), Ketelaars, Wilhelmus S.M.M. (author), Belic, Nikola (author), Hofmann, Ulrich (author), Hagen, C.W. (author)
There is a growing interest for patterning on curved or tilted surfaces using electron beam lithography. Computational proximity correction techniques are well established for flat surfaces and perpendicular exposure, but for curved and tilted surfaces adjustments are needed as the dose distribution is no longer cylindrically symmetric with...
journal article 2019
Searched for: author:"Hagen, C.W."
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