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Hannot, S.D.A. (author), Verhoosel, C.V. (author), Rixen, D.J. (author)
Electro–mechanical sensors and actuators are a specific type of microsystems. The electrostatic pull-in value is one of the defining characteristics for these devices. Because the material and geometrical properties of micro fabricated systems are often very uncertain, this pull-in value can be subject to considerable variations. Therefore it is...
journal article 2010
Hannot, S.D.A. (author)
Microsystems are very small sensors and actuators, manufactured with the same technology as computer chips. Well known applications of these machines are the acceleration sensors in the Wii game console and the iPhone. At the micrometer length scales of microsystems the physical forces behave different when compared to devices operating in the...
doctoral thesis 2010