Design & Modeling of a MEMS Contact-mode Piezoresistive Detector for Pull-in Acceleration Sensing

Recently a new kind of accelerometer was developed. The accelerometer uses the pull-in time to measure the accelerations. However most of the applied measurement techniques for this kind of accelerometers had shown some drawbacks in the working process. So in this dissertation a new measurement method is introduced based on piezoresistivity to...

Design and Modeling of a Flexible Contact-Mode Piezoresistive Detector for Time-Based Acceleration Sensing

This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...