Searched for: author:"Hekner, S.M."
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Hekner, S.M. (author)
ASML's wafer scanners are crucial machines in the production of integrated circuits (ICs). An important performance parameter in these photo-lithographic machines is the so-called stacking precision, which is a measure for the accurate stacking of multiple layers during the photo-lithography process in the xy-plane. The stacking precision is,...
master thesis 2016