Searched for: author:"Marinescu, O."
(1 - 10 of 10)
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Marinescu, O. (author), Bociort, F. (author)
The merit function space of mirror system for extreme ultraviolet (EUV) lithography is studied. Local minima situated in the multidimensional optical merit function space are connected via links that contain saddle points and form a network. We present networks for EUV lithographic objective designs and discuss how these networks change when...
journal article 2007
document
Bociort, F. (author), Van Turnhout, M. (author), Marinescu, O. (author)
Saddle-point construction (SPC) is a new method to insert lenses into an existing design. With SPC, by inserting and extracting lenses new system shapes can be obtained very rapidly, and we believe that, if added to the optical designer’s arsenal, this new tool can significantly increase design productivity in certain situations. Despite the...
conference paper 2007
document
Marinescu, O. (author), Bociort, F. (author)
Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...
conference paper 2006
document
Marinescu, O. (author), Bociort, F. (author)
Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...
conference paper 2006
document
Marinescu, O. (author), Bociort, F. (author)
The multidimensional merit function space of complex optical systems contains a large number of local minima that are connected via links that contain saddle points. In this work, we illustrate a method to construct such saddle points with examples of deep UV objectives and extreme UV mirror systems for lithography. The central idea of our...
conference paper 2005
document
Marinescu, O. (author), Bociort, F. (author)
The merit function space of mirror systems for EUV lithography is studied. Local minima situated in a multidimensional merit function space are connected via links that contain saddle points and form a network. In this work we present the first networks for EUV lithographic objectives and discuss how these networks change when control parameters...
conference paper 2005
document
Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)
When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...
conference paper 2004
Searched for: author:"Marinescu, O."
(1 - 10 of 10)